Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 842-846

  Franta, Daniel ^a   Ohlídal, Ivan ^a   Klapetek, Petr ^b   Nepustilová, Růžena ^c   Bajer, Svatopluk ^c  

^a MASARYK UNIVERSITY   (Czech Republic)

^b CZECH METROLOGY INSTITUTE   (Czech Republic)

^c Autopal sro ^*  (Czech Republic)

Author keywords

AFM; Ellipsometry; Polymer films; Reflectometry

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LEVELS; ELLIPSOMETRY; REFLECTOMETERS; SURFACE TREATMENT; THIN FILMS;

MULTISAMPLE MODIFICATION; PARAMETERIZATION; POLYMER FILMS; REFLECTOMETRY;

METALLIC FILMS;

EID: 33646561565     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2169     Document Type: Conference Paper

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