New 'monolithic' templates and improved protocols for soft lithography and microchip fabrication

Journal of Physics Condensed Matter

Volumn 18, Issue 18, 2006, Pages

  Pallandre, Antoine ^a   Pal, Debjani ^a   De Lambert, Bertrand ^a   Viovy, Jean Louis ^a   Fütterer, Claus ^a,b  

^a INSTITUT CURIE   (France)

^b Fluigent   (France)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; OLEFINS; POLYMERS; POLYSILANES; SEPARATION; SILICON;

CYCLIC OLEFIN COPOLYMER (COC); MICROCHIP FABRICATION; POLYDIMETHYLSILOXANE (PDMS);

LITHOGRAPHY;

EID: 33646187267     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/18/S12     Document Type: Article

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