Deformable MEMS grating for wide tunability and high operating speed

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6114, Issue , 2006, Pages

  Tormen, Maurizio ^a   Peter, Yves Alain ^b   Niedermann, Philippe ^a   Hoogerwer, Arno ^a   Shea, Herbert ^c   Stanley, Ross ^a  

^a CSEM   (Switzerland)

^b ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^c EPFL   (Switzerland)

Author keywords

Diffractive MEMS; MEMS Grating; Optical MEMS; Tunable laser

Indexed keywords

CAVITY RESONATORS; DIFFRACTION GRATINGS; SCANNING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

DIFFRACTIVE MEMS; MEMS GRATING; OPTICAL MEMS; TUNABLE LASERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33646180846     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.644523     Document Type: Conference Paper

References (13)

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