MOEMS tuning element for a Littrow external cavity laser

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 921-928

  Syms, Richard R A ^a   Lohmann, Anke ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

External cavity; Grating; Microelectromechanical systems (MEMS); Microoptoelectromechanical systems (MOEMS); Semiconductor laser

Indexed keywords

DIFFRACTION GRATINGS; LASER TUNING; MIRRORS; REACTIVE ION ETCHING; SEMICONDUCTOR LASERS; SILICON ON INSULATOR TECHNOLOGY;

ELECTROMECHANICAL PERFORMANCE; MICROOPTOELECTROMECHANICAL SYSTEM; MINIATURE GRATING TUNABLE EXTERNAL CAVITY LASER;

MICROELECTROMECHANICAL DEVICES;

EID: 0742286711     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820269     Document Type: Article

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