Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators

Applied Optics

Volumn 42, Issue 4, 2003, Pages 621-626

  Wong, Chee Wei ^a   Jeon, Yongbae ^a   Barbastathis, George ^a   Kim, Sang Gook ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; LIGHT MODULATION; MICROACTUATORS; MICROMACHINING;

MICROFABRICATED GRATINGS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037325147     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.000621     Document Type: Article

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