Pattern-induced alignment of silicon islands on buried oxide layer of silicon-on-insulator structure

Applied Physics Letters

Volumn 83, Issue 15, 2003, Pages 3162-3164

  Ishikawa, Yasuhiko ^a   Imai, Yasuhiro ^a   Ikeda, Hiroya ^a   Tabe, Michiharu ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRON BEAM LITHOGRAPHY; OXIDATION; SEMICONDUCTING SILICON; SILICA;

SILICON ISLANDS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0242367475     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1617370     Document Type: Article

References (18)

1. H. Grabert and M. H. Devoret, Single Charge Tunneling (Plenum, New York, 1992).
2. C. S. Lent and P. D. Tougaw, J. Appl. Phys. 74, 6227 (1993).
3. M. Tabe, N. Asahi, Y. Amemiya, and Y. Terao, Jpn. J. Appl. Phys., Part 1 36, 4176 (1997).
4. J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals (Princeton University Press, Princeton, NJ, 1995).
5. E. Leobandung, L. Guo, Y. Wang, and S. Y. Chou, Appl. Phys. Lett. 67, 938 (1995).
6. Y. Takahashi, M. Nagase, H. Namatsu, K. Kurihara, K. Iwadate, Y. Nakajima, S. Horiguchi, K. Murase, and M. Tabe, Electron. Lett. 31, 136 (1995).
7. J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, and H. I. Smith, Nature (London) 390, 143 (1997).
8. R. Nuryadi, Y. Ishikawa, and M. Tabe, Appl. Surf. Sci. 159-160, 121 (2000).
9. R. Nuryadi, Y. Ishikawa, Y. Ono, and M. Tabe, J. Vac. Sci. Technol. B 20, 167 (2002).
10. Y. Ishikawa, M. Kumezawa, R. Nuryadi, and M. Tabe, Appl. Surf. Sci. 190, 11 (2002).
11. B. Legrand, V. Agache, J. P. Nys, V. Senez, and D. Stievenard, Appl. Phys. Lett. 76, 3271 (2000).
12. B. Legrand, V. Agache, T. Melin, J. P. Nys, V. Senez, and D. Stievenard, J. Appl. Phys. 91, 106 (2002).
13. Y. Ono, M. Nagase, M. Tabe, and Y. Takahashi, Jpn. J. Appl. Phys., Part 1 34, 1728 (1995).
14. (Unpublished data).
15. T. I. Kamins and R. S. Williams, Appl. Phys. Lett. 71, 1201 (1997).
16. G. Jin, J. L. Liu, S. G. Thomas, Y. H. Luo, K. L. Wang, and B.-Y. Nguyen, Appl. Phys. Lett. 75, 2752 (1999).
17. O. G. Schmidt, N. Y. Jin-Phillipp, C. Lange, U. Denker, K. Eberl, R. Schreiner, H. Grabeldinger, and H. Schweizer, Appl. Phys. Lett. 77, 4139 (2000).
18. D. J. Eaglesham, A. E. White, L. C. Feldman, N. Moriya, and D. C. Jacobson, Phys. Rev. Lett. 70, 1643 (1993).