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Volumn 23, Issue 3-4 SPEC. ISS., 2004, Pages 280-284

Free-standing Si/SiGe micro- and nano-objects

Author keywords

Nanotubes; Si; SiGe; Ultra high vacuum chemical vapor deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON BEAM LITHOGRAPHY; HETEROJUNCTIONS; MICROELECTRONICS; NANOSTRUCTURED MATERIALS; REACTIVE ION ETCHING;

HELICAL COILS; SIGE; ULTRA-HIGH VACUUM CHEMICAL VAPOR DEPOSITION; VERTICAL RINGS;

SILICON;

EID: 3142671288 PISSN: 13869477 EISSN: None Source Type: Journal
DOI: 10.1016/j.physe.2003.12.131 Document Type: Conference Paper

Times cited : (46)

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