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Volumn 54, Issue 12, 2006, Pages 2125-2129
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A novel method for the production of aluminium nitride
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Author keywords
Aluminium; Nitrides; Thin films
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Indexed keywords
MAGNESIUM POWDER;
MAGNESIUM PRINTING PLATES;
MATERIALS SCIENCE;
NITROGEN;
THIN FILMS;
ALN SURFACE LAYERS;
NITRIDE LAYERS;
PROTECTIVE OXIDE;
ALUMINUM NITRIDE;
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EID: 33646028190
PISSN: 13596462
EISSN: None
Source Type: Journal
DOI: 10.1016/j.scriptamat.2006.02.047 Document Type: Article |
Times cited : (27)
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References (29)
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