Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding

Applied Optics

Volumn 45, Issue 8, 2006, Pages 1737-1742

  Saran, Anish ^a   Abeysinghe, Don C ^a   Boyd, Joseph T ^a  

^a 705 Engineering Research Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRY-PEROT INTERFEROMETERS; INTEGRATED OPTICS; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBERS; PRESSURE CONTROL;

ANODIC BONDING; SILICON ETCHING; STRESS-REDUCING LAYERS; ULTRATHIN SILICON;

SENSORS;

EID: 33645788871     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001737     Document Type: Article

References (16)

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