Fabry-Perot pressure sensor arrays for imaging surface pressure distributions

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1469-1472

  Miller, M F ^a   Allen, M G ^a   Arkilic, E ^a   Breuer, K S ^a   Schmidt, M A ^a  

^a PHYSICAL SCIENCES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ETALONS; IMAGING SYSTEMS; LIGHT; MATHEMATICAL MODELS; PRESSURE; REFLECTION; SENSORS; SURFACES;

PRESSURE DISTRIBUTION; PRESSURE SENSOR; SENSOR ARRAY;

FABRY-PEROT INTERFEROMETERS;

EID: 0030688459     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)