Diaphragm deflection of silicon interferometer structures used as pressure sensors

Sensors and Actuators, A: Physical

Volumn 58, Issue 2, 1997, Pages 99-107

  Xiao, Zhaohua ^a   Engström, Olof ^a,c   Vidovic, Nevio ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Samba Sensors AB   (Sweden)

^c ABB CORPORATE RESEARCH   (Sweden)

Author keywords

Diaphragms; Interferometers; Optical fibers; Pressure sensors; Silicon

Indexed keywords

DIAPHRAGMS; FIBER OPTIC SENSORS; FINITE ELEMENT METHOD; INTERFEROMETERS; SILICON WAFERS;

PRESSURE SENSORS; SILICON INTERFEROMETERS;

PRESSURE GAGES;

EID: 0031060751     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01398-2     Document Type: Article

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