Patterned regions of porous silicon through trapped hydrogen bubbles

Applied Physics Letters

Volumn 88, Issue 14, 2006, Pages

  Ou, Fung Suong ^a,b   Saraf, Laxmikant V ^b   Baer, Donald R ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHING; HYDROGEN BUBBLES; PATTERNED REGIONS; SURFACE PROFILES;

BUBBLES (IN FLUIDS); ETCHING; HYDROGEN; LITHOGRAPHY; POROSITY; SINGLE CRYSTALS;

POROUS SILICON;

EID: 33645676960     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2188039     Document Type: Article

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