Localized and directed lateral growth of carbon nanotubes from a porous template

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2745-2748

  Wind, S J ^a   Martel, R ^a   Avouris, Ph ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; DIFFUSION; ELECTROCHEMISTRY; ELECTRON BEAM LITHOGRAPHY; ETCHING; GROWTH (MATERIALS); IRON; MOLYBDENUM; POLYMETHYL METHACRYLATES; POROUS SILICON; SURFACES;

ETCHED POSTS; POROUS TEMPLATE;

CARBON NANOTUBES;

EID: 0036883152     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1523019     Document Type: Article

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