Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing

Applied Physics Letters

Volumn 87, Issue 5, 2005, Pages

  Wang, Xuefeng ^a   Vincent, Loren ^a   Bullen, David ^a   Zou, Jun ^a   Liu, Chang ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER PROBE; NANOLITHOGRAPHY WRITING MODE; OVERALL FORCE CONSTANT; SCANNING PROBE LITHOGRAPHY;

FINITE ELEMENT METHOD; ION BEAMS; MILLING (MACHINING); NANOTECHNOLOGY; NUMERICAL METHODS; SPRINGS (COMPONENTS); STRUCTURES (BUILT OBJECTS);

LITHOGRAPHY;

EID: 33645524538     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2006210     Document Type: Article

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