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Volumn 100, Issue 26, 1996, Pages 11086-11091

Scanning probe lithography. 3. Nanometer-scale electrochemical patterning of Au and organic resists in the absence of intentionally added solvents or electrolytes

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Indexed keywords


EID: 33645508653     PISSN: 00223654     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp960271p     Document Type: Article
Times cited : (85)

References (79)
  • 3
    • 0342676983 scopus 로고
    • Wiesendanger, R., Güntherodt, H.-J., Eds.; Springer-Verlag: New York
    • Staufer, U. In Scanning Tunneling Microscopy II; Wiesendanger, R., Güntherodt, H.-J., Eds.; Springer-Verlag: New York, 1992; Vol. 28, pp 273-302 and references cited therein.
    • (1992) Scanning Tunneling Microscopy II , vol.28 , pp. 273-302
    • Staufer, U.1
  • 28
    • 85033065412 scopus 로고    scopus 로고
    • note
    • The sample holder is similar to one designed by White et al. It is a brass block measuring 10 mm × 10 mm × 3 mm with a 4 mm diameter hole drill through the center of the block. Two set screws are aligned opposite each other and centered on the through hole. These screws can be used to anchor the sample in the middle of the through hole if desired. We cut a groove perpendicular to the set screws connecting the 4 mm through hole to the outside edge of the block. A third set screw is aligned perpendicular to the slot and serves to hold the sample in place.
  • 29
    • 85033049716 scopus 로고    scopus 로고
    • note
    • We define the RMS roughness factor (RRF) as RRF = (RMS roughness of the patterned area)/(RMS roughness of the unpatterned terrace).
  • 30
    • 85033055789 scopus 로고    scopus 로고
    • note
    • Images obtained in dry and humid environments were essentially identical. However, in dry environments the tip became fouled more quickly and efforts to "clean" the tip by applying a short bias pulse were much less effective.
  • 39
    • 85033046616 scopus 로고    scopus 로고
    • note
    • The NanoScope software calculates the mean feature level in the roughness analysis feature by calculating the average of all the z values within a selected area relative to the z value of the tip when it is engaged.
  • 49
    • 85033072118 scopus 로고    scopus 로고
    • note
    • Also, the first patterning cycle in a dry environment after the system has been exposed to a humid environment frequently forms a partial pattern. This is probably the result of residual water on the hydrophilic tip. Similarly, when returning to a humid environment, frequently only a partial pattern is formed if the system is not fully equilibrated with the ambient.
  • 65
    • 26444462568 scopus 로고
    • Burke, J. J., Reed, N., Weiss, V., Eds.; Syracuse University Press: Syracuse, NY
    • Gjostein, N. A. In Surfaces and Interfaces I; Burke, J. J., Reed, N., Weiss, V., Eds.; Syracuse University Press: Syracuse, NY, 1966; pp 271-304.
    • (1966) Surfaces and Interfaces I , pp. 271-304
    • Gjostein, N.A.1
  • 78
    • 85033039371 scopus 로고    scopus 로고
    • The University of Texas at Austin, personal communication
    • Fan, F. R.; Bard, A. J. The University of Texas at Austin, personal communication.
    • Fan, F.R.1    Bard, A.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.