HfC field emitter array controlled by built-in poly-Si thin film transistor

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 936-939

  Nagao, M ^a   Yasumuro, C ^a   Sacho, Y ^a   Tanoue, H ^a   Kanemaru, S ^a   Itoh, J ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; COATING TECHNIQUES; FIELD EMISSION DISPLAYS; LEAKAGE CURRENTS; LOW TEMPERATURE EFFECTS; SILICON; VOLTAGE CONTROL;

FIELD EMITTER ARRAYS (FEA); GATE ELECTRODES; LIGHTLY DOPED DRAIN (LDD); SOURCE-DRAIN VOLTAGE;

THIN FILM TRANSISTORS;

EID: 33645511819     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2183779     Document Type: Article

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