Setup of a scanning near field infrared microscope (SNIM): Imaging of sub-surface nano-structures in gallium-doped silicon

Physical Chemistry Chemical Physics

Volumn 8, Issue 6, 2006, Pages 753-758

  Samson, Jean Sébastien ^a   Wollny, Götz ^a   Bründermann, Erik ^a   Bergner, Andreas ^b   Hecker, Andreas ^c   Schwaab, Gerhard ^a   Dirk Wieck, Andreas ^a   Havenith, Martina ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b LOT Oriel GmbH   (Germany)

^c Leica Microsystems CMS ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM; NANOMATERIAL; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; COMPARATIVE STUDY; COMPUTER SIMULATION; CONFOCAL MICROSCOPY; INSTRUMENTATION; METHODOLOGY; NEAR INFRARED SPECTROSCOPY; PARTICLE SIZE; PHYSICAL CHEMISTRY; SURFACE PROPERTY; ULTRASTRUCTURE;

CHEMISTRY, PHYSICAL; COMPUTER SIMULATION; GALLIUM; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, CONFOCAL; NANOSTRUCTURES; PARTICLE SIZE; SILICON; SPECTROSCOPY, NEAR-INFRARED; SURFACE PROPERTIES;

EID: 33645460979     PISSN: 14639076     EISSN: None     Source Type: Journal    
DOI: 10.1039/b512780g     Document Type: Article

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