Photon-sieve lithography

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 22, Issue 2, 2005, Pages 342-345

  Menon, Rajesh ^a   Gil, Dario ^a,c   Barbastathis, George ^b   Smith, Henry ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Massachusetts Institute of Technology   (United States)

^c IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; FOCUSING; LITHOGRAPHY; OPTICAL DEVICES; PHOTONS; SCANNING; SCANNING ELECTRON MICROSCOPY;

PHOTON SIEVES; ZONE PLATES;

OPTICAL DESIGN;

EID: 13644260956     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.22.000342     Document Type: Article

References (8)

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8. G. J. Dolan and T. A. Fulton, "Canyon lithography," IEEE Electron Device Lett. 4, 178-180 (1983).