Paper: A Study on High-Output Resonance-Driven Piezoelectric Micropumps Using Active Check Valves

Journal of Robotics and Mechatronics

Volumn 16, Issue 2, 2004, Pages 171-177

  Park, Jung Ho ^a   Yoshida, Kazuhiro ^a   Ishikawa, Chikara ^a   Yokota, Shinichi ^a   Seto, Takeshi ^b   Takagi, Kunihiko ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b SEIKO EPSON CORPORATION   (Japan)

Author keywords

bi directional flow; check valve; micropump; phase shift; piezoelectric actuator; shuttle valve; timing control

Indexed keywords

PIEZOELECTRICITY; PUMPS; TIMING CIRCUITS;

BI-DIRECTIONAL FLOWS; CHECK VALVES; EFFECTIVE SIZE; HIGH OUTPUT; MICRO PUMP; PIEZOELECTRIC MICROPUMPS; PUMP CHAMBERS; SHUTTLE VALVE; TAP WATER; TIMING CONTROL;

PIEZOELECTRIC ACTUATORS;

EID: 33645310240     PISSN: 09153942     EISSN: 18838049     Source Type: Journal    
DOI: 10.20965/jrm.2004.p0171     Document Type: Article

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