A Piezoelectric Micropump Using Resonance Drive with High Power Density

JSME International Journal. Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 45, Issue 2, 2002, Pages 502-509

  Park, Jung Ho ^a   Yokota, Shinichi ^a   Yoshida, Kazuhiro ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Fluid Power Systems; Mechatronics and Robotics; Micromachine; Micropump; Piezoelectric Actuator; Positive Displacement Fluid Machinery; Power Density; Resonance Drive

Indexed keywords

EID: 84988359993     PISSN: 13447653     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmec.45.502     Document Type: Article

References (10)

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