Characterization of interfacial layers and surface roughness using spectroscopic reflectance, spectroscopic ellipsometry and atomic force microscopy

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4689 II, Issue , 2002, Pages 756-764

  Hoobler, Ray J ^a   Korlahalli, Rahul ^a   Boltich, Ed ^a   Serafin, Joe ^b  

^a NANOMETRICS INC   (United States)

^b UNIVERSITY OF SOUTH ALABAMA   (United States)

Author keywords

AFM; Ellipsometry; Interfacial layer; Reflectance; Roughness

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; LIGHT REFLECTION; MEASUREMENT THEORY; OPTICAL PROPERTIES; SILICA; SURFACE ROUGHNESS;

SPECTROSCOPIC REFLECTANCE DATA;

THIN FILMS;

EID: 0036029736     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.473520     Document Type: Article

References (8)

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