Infrared spectroscopy of oxygen interstitials and precipitates in nitrogen-doped silicon

Physica B: Condensed Matter

Volumn 376-377, Issue 1, 2006, Pages 150-153

  Sctoudek R ^a   Humlicek J ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Interstitial oxygen; Nitrogen doping; Precipitate; Silicon

Indexed keywords

HEAT TREATMENT; INFRARED SPECTROSCOPY; NITROGEN; OXYGEN; PRECIPITATION (CHEMICAL);

INTERSTITIAL OXYGEN; NITROGEN DOPING; OXYGEN ATOMS;

AMORPHOUS SILICON;

EID: 33645234010     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2005.12.040     Document Type: Conference Paper

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