Source optimization for magnetron sputter-deposition of NbTiN tuning elements for SIS THz detectors

Superconductor Science and Technology

Volumn 12, Issue 11, 1999, Pages 736-740

  Iosad, N N ^a   Jackson, B D ^a   Ferro, F ^a   Gao, J R ^b   Polyakov, S N ^c   Dmitriev, P N ^d   Klapwijk, T M ^e  

^a UNIVERSITY OF GRONINGEN   (Netherlands)

^b SRON NETHERLANDS INSTITUTE FOR SPACE RESEARCH   (Netherlands)

^c MOSCOW STATE UNIVERSITY   (Russian Federation)

^d INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

^e DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FREQUENCIES; MAGNETRON SPUTTERING; MAGNETRONS; MAGNETS; MIXER CIRCUITS; NIOBIUM COMPOUNDS; PRESSURE EFFECTS; RADIATION DETECTORS;

GAP FREQUENCY; MAGNETIC TRAP CONFIGURATIONS; SPUTTERING PRESSURE; TARGET LIFETIME; TUNING CIRCUITS;

SUPERCONDUCTING FILMS;

EID: 0033225714     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/12/11/314     Document Type: Article

References (14)

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