A new three-dimensional lithography using Polymer Dispersed Liquid Crystal (PDLC) films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 110-113

  Jeon, Jin Wan ^a   Choi, Joon Yong ^a   Yoon, Jun Bo ^a   Lim, Koeng Su ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSIONS; LITHOGRAPHY; MICROSTRUCTURE; PHOTORESISTORS; ULTRAVIOLET RADIATION; VOLTAGE CONTROL;

PHOTORESIST MICROSTRUCTURES; POLYMER DISPERSED LIQUID CRYSTAL (PDLC) FILMS; ULTRAVIOLET (UV) RAYS;

LIQUID CRYSTALS;

EID: 33644988513     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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