Influence of post-annealing on the characteristics of Pb(Zr,Ti)O 3 thin films deposited by liquid delivery MOCVD using a cocktail solution

Integrated Ferroelectrics

Volumn 59, Issue , 2003, Pages 1475-1482

  Otani, Yohei ^a   Abe, Norikazu ^a   Okamura, Soichiro ^a   Shiosaki, Tadashi ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Liquid delivery MOCVD; PbPtx; Post annealing; PZT; Thin film

Indexed keywords

ANNEALING; HYSTERESIS; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; TITANIUM OXIDES; ZIRCONIA;

LIQUID DELIVERY; PBPTX; POST ANNEALING; PZT;

FERROELECTRIC THIN FILMS;

EID: 33644976353     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390259966     Document Type: Article

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