Characteristics of ferroelectric SrBi2Ta2O9 thin films grown by "flash" MOCVD

Integrated Ferroelectrics

Volumn 14, Issue 1-4, 1997, Pages 95-103

  Isobe, C ^a   Ami, T ^a   Hironaka, K ^a   Watanabe, K ^a   Sugiyama, M ^a   Nagel, N ^a   Katori, K ^a   Ikeda, Y ^a   Gutleben, C D ^a   Tanaka, M ^a   Yamoto, H ^a   Yagi, H ^a  

^a SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; FERROELECTRIC MATERIALS; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NONVOLATILE STORAGE; PEROVSKITE; PLATINUM; STRONTIUM COMPOUNDS; THIN FILMS; VAPORIZATION;

SATURATED HYSTERESIS LOOPS;

DIELECTRIC FILMS;

EID: 0031331678     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708019981     Document Type: Article

References (11)

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