Scaling down of microequipment parameters

Precision Engineering

Volumn 30, Issue 2, 2006, Pages 211-222

  Kussul, Ernst ^a   Baidyk, Tatiana ^a   Ruiz Huerta, Leopoldo ^a   Caballero Ruiz, Alberto ^a   Velasco, Graciela ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Machine tool error estimation; Micromachine tools; Micromechanics; Precision; Scaling down

Indexed keywords

COMPOSITE MICROMECHANICS; ERROR ANALYSIS; MACHINE DESIGN; MACHINE TOOLS; PRECISION ENGINEERING;

MACHINE TOOL ERROR ESTIMATION; MICROMACHINE TOOLS; PRECISION; SCALING DOWN;

MICROELECTROMECHANICAL DEVICES;

EID: 33644906910     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2005.08.001     Document Type: Article

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