High volume production of silicon sensor microsystems for automotive applications

IEE Colloquium (Digest)

Volumn , Issue 4, 1997, Pages

  Ohlckers, Per ^a   Jakobsen, Henrik ^a  

^a SensoNor Asa   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOTIVE ENGINEERING; MICROELECTROMECHANICAL DEVICES;

MICROELECTROMECHANICAL SYSTEMS (MEMS); SILICON MICROMECHANICS TECHNOLOGY;

SILICON SENSORS;

EID: 0030716620     PISSN: 09633308     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Dr. G. Tschulena: "Micromechanics Business Opportunities"; Proceedings Micro System Technologies 92, vde-verlag gmbh, Berlin.
2. Frost and Sullivan: "European Silicon Sensor Markets", 1993.
3. Ljubica Ristic (editor) : "Sensor Technology and Devices"; Artech House (1994).
4. G. Klein Lebbink (editor): "Microsystem technology - exploring opportunities"; Samsom Bedrijftslnformatie bv
5. ASIC Outlook 1994; ICE.
6. E. Hetcht, Scaum's Outline of Theory and Problems of Optics, McGraw-Hill, 1975.
7. A. Ferber and K. Aamold, FTIR Based Thickness Measurements of Silicon Sensors, SINTEF-report, Jan. 1996.
8. Data sheet: SA30 Crash Sensor; SensoNor asa, P.O.Box 196, N-3192 Horten, Norway.