Fragment ions of methylsilane produced by hot tungsten wires

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 3 A, 2006, Pages 1813-1815

  Yoshimura, Satoru ^a   Toh, Akinori ^a   Maeda, Takuya ^a   Sugimoto, Satoshi ^a   Kiuchi, Masato ^a,b   Hamaguchi, Satoshi ^a  

^a OSAKA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Cat CVD; Fragment ion; Hot tungsten wire; Hot wire CVD; Low energy mass analyzed ion beam; Methylsilane

Indexed keywords

CATALYSIS; ION BEAMS; TUNGSTEN; WIRE;

CAT-CVD; FRAGMENT ION; HOT TUNGSTEN WIRE; HOT WIRE CVD; LOW-ENERGY MASS ANALYZED ION BEAM; METHYLSILANE;

CHEMICAL VAPOR DEPOSITION;

EID: 33644900266     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.1813     Document Type: Article

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