Development and properties of a Freeman-type hybrid ion source

Review of Scientific Instruments

Volumn 71, Issue 2 II, 2000, Pages 1168-1170

  Matsumoto, T ^a   Mimoto, K ^a   Goto, S ^a   Ohba, M ^b   Agawa, Y ^b   Kiuchi, M ^c  

^a OSAKA UNIVERSITY   (Japan)

^b ULVAC INC   (Japan)

^c OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009838896     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150417     Document Type: Article

References (9)

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8. J. J. Cuomo and S. M. Rossnagel, Handbook of Ion Beam Processing Technology (Noyes, New Jersey, 1989).
9. T. Matsumoto, K. Mimoto, M. Kiuchi, and S. Goto (unpublished).