메뉴 건너뛰기




Volumn 504, Issue 1-2, 2006, Pages 108-112

Grain boundary structures of atomic layer deposited TiN

Author keywords

Grain boundary; Titanium nitride

Indexed keywords

CRYSTAL STRUCTURE; GRAIN BOUNDARIES; OPTICAL INTERCONNECTS; POLYCRYSTALLINE MATERIALS; THIN FILMS; TITANIUM NITRIDE;

EID: 33644900196     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.09.150     Document Type: Conference Paper
Times cited : (11)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.