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Volumn 504, Issue 1-2, 2006, Pages 108-112
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Grain boundary structures of atomic layer deposited TiN
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Author keywords
Grain boundary; Titanium nitride
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Indexed keywords
CRYSTAL STRUCTURE;
GRAIN BOUNDARIES;
OPTICAL INTERCONNECTS;
POLYCRYSTALLINE MATERIALS;
THIN FILMS;
TITANIUM NITRIDE;
ATOMIC LAYER DEPOSITED TIN;
CHEMICAL STABILITY;
SMALL ANGLE BOUNDARIES;
ULSI DEVICES;
DEPOSITION;
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EID: 33644900196
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2005.09.150 Document Type: Conference Paper |
Times cited : (11)
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References (15)
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