Effects of experimental parameters on the physical properties of non-stoichiometric sputtered vanadium nitrides films

Catalysis Today

Volumn 113, Issue 3-4, 2006, Pages 270-274

  Gueddaoui, H ^a,c   Schmerber, G ^b   Abes, M ^b   Guemmaz, M ^a   Parlebas, J C ^b  

^a FERHAT ABBAS UNIVERSITY   (Algeria)

^b UNIVERSITÉ DE STRASBOURG   (France)

^c UNIVERSITY OF SCIENCES AND TECHNOLOGY HOUARI BOUMEDIENE   (Algeria)

Author keywords

Crystallographic structure; Optical properties; Reactive sputtering; Vanadium nitrides

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLOGRAPHY; NITROGEN; OPTICAL PROPERTIES; VANADIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLOGRAPHIC STRUCTURE; REACTIVE SPUTTERING; VANADIUM NITRIDES;

THIN FILMS;

EID: 33644891627     PISSN: 09205861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cattod.2005.11.079     Document Type: Article

References (10)

1. R. Sanjinés, C. Wiemer, P. Hones, and F. Lévy J. Appl. Phys. 83 1998 1396
2. N. Saudhakar, R.S. Ninghtoujam, K.P. Rajeev, A.K. Nigam, J. Weissmullert, and N.S. Gajbhiye J. Appl. Phys. 96 2004 688
3. E. D'Anna, A. Di Cristoforo, M. Fernandez, and G. Leggieri Appl. Surf. Sci. 186 2002 496
4. M.Y. Liao, Y. Gotoh, H. Tsuji, and J. Ishikawa J. Vac. Sci. Technol. A 22 2004 146
5. X. Chu, S.A. Barnett, M.S. Wong, and W.D. Sproul J. Vac. Sci. Technol. A 14 1996 3124
6. C.-H. Ma, K.-H. Huang, and H. Chen Surf. Coat. Technol. 133-134 2000 289
7. T.B. Massalski Binary Alloy Phase Diagram 1990 ASM Metals Park, OH p. 2711
8. O.N. Carlson, J.F. Smith, and R.H. Nafziger Phase Diagrams of Binary Vanadium Alloys 1989 p. 148
9. H.-M. Benia, M. Guemmaz, G. Schmerber, A. Mosser, and J.-C. Parlebas Appl. Surf. Sci. 200 2002 231
10. M. Torche, G. Schmerber, M. Guemmaz, A. Mosser, and J.-C. Parlebas Thin Solid Films 436 2003 208