Excimer laser reactive deposition of vanadium nitride thin films

Applied Surface Science

Volumn 186, Issue 1-4, 2002, Pages 496-501

  D'Anna, E ^a   Di Cristoforo, A ^b   Fernandez M ^a   Leggieri, G ^a   Luches, A ^a   Majni, G ^b   Mengucci, P ^b   Nanai, L ^c  

^a UNIVERSITY OF SALENTO   (Italy)

^b INFM   (Italy)

^c SZFSZ JGYYTF   (Hungary)

Author keywords

Laser ablation; Reactive laser ablation; Vanadium nitride

Indexed keywords

CRYSTAL STRUCTURE; EXCIMER LASERS; MAGNETRON SPUTTERING; PHASE DIAGRAMS; PHASE TRANSITIONS; PULSED LASER DEPOSITION; SILICON WAFERS; SUBSTRATES; VANADIUM COMPOUNDS;

LASER REACTIVE DEPOSITION;

THIN FILMS;

EID: 0037185120     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00757-7     Document Type: Conference Paper

References (12)