Formation of polymers in TMGa/NH3/H2 system under GaN growth

Journal of Crystal Growth

Volumn 289, Issue 2, 2006, Pages 428-432

  Hirako, Akira ^a   Ohkawa, Kazuhiro ^a,b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

A1. Computer simulation; A3. Metalorganic vapor phase epitaxy; B1. Nitrides; B2. Semiconducting gallium compounds

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; GALLIUM NITRIDE; HEAT TRANSFER; METALLORGANIC VAPOR PHASE EPITAXY;

GA-N POLYMERS; GAN GROWTH; RADIATIVE HEAT TRANSFER;

POLYMERS;

EID: 33644890523     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.11.125     Document Type: Article

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