Effect of hydrogen doping on structural and piezoelectric properties of sputtered ZnO films

Integrated Ferroelectrics

Volumn 69, Issue , 2005, Pages 431-442

  Lee, Man Jong ^a   Yoon, Young Soo ^b  

^a Agency for Defence Development   (South Korea)

^b Konkuk University   (South Korea)

Author keywords

AFM; Hydrogen; Piezoelectric; Thin films; ZnO

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; OXYGEN; SEMICONDUCTOR DOPING; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

GAS MIXTURES; HYDROGENATED ZINC OXIDE (ZNO.H); PIEZOELECTRIC DISPLACEMENT;

THIN FILMS;

EID: 33644798917     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580590899982     Document Type: Conference Paper

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