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Volumn 69, Issue , 2005, Pages 103-111

Piezoelectric properties of self-polarized Pb(ZrxTi 1-x)O3 thin films probed by scanning force microscopy

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; MATHEMATICAL MODELS; PIEZOELECTRICITY; PLATINUM; SILICA; THIN FILMS; TITANIUM;

EID: 33644795364     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: None     Document Type: Conference Paper
Times cited : (13)

References (10)
  • 1
    • 0001171597 scopus 로고
    • Integrated ferroelectric microelectromechanical systems (MEMS)
    • D. L. Polla and P. J. Schiller, "Integrated ferroelectric microelectromechanical systems (MEMS)," Integr. Ferroelectr. 7, 359-370 (1995).
    • (1995) Integr. Ferroelectr. , vol.7 , pp. 359-370
    • Polla, D.L.1    Schiller, P.J.2
  • 2
    • 0033356436 scopus 로고    scopus 로고
    • Self-polarization control of radio-frequency-sputtered lead zirconate titanate films
    • G. Suchaneck, R. Koehler, P. Padmini, T. Sandner, J. Frey, and G. Gerlach, "Self-polarization control of radio-frequency-sputtered lead zirconate titanate films," Surf. Coat. Tech. 116-119, 1238-1243 (1999).
    • (1999) Surf. Coat. Tech. , vol.116-119 , pp. 1238-1243
    • Suchaneck, G.1    Koehler, R.2    Padmini, P.3    Sandner, T.4    Frey, J.5    Gerlach, G.6
  • 6
    • 0034262866 scopus 로고    scopus 로고
    • Epitaxial growth of BaTiO3 thin films by high gas pressure sputtering
    • T. Yasumoto, N. Yanase, K. Abe, and T. Kawakubo, "Epitaxial growth of BaTiO3 thin films by high gas pressure sputtering," Jpn. J. Appl. Phys. 39, 5369-5373 (2000).
    • (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 5369-5373
    • Yasumoto, T.1    Yanase, N.2    Abe, K.3    Kawakubo, T.4
  • 9
    • 0031162755 scopus 로고    scopus 로고
    • Characterization of ferroelectric lead zirconate titanate films by scanning force microscopy
    • G. Zavala, J. H. Fendler, and S. Trolier-McKinstry, " Characterization of ferroelectric lead zirconate titanate films by scanning force microscopy," J. Appl. Phys. 81, 7480-7491 (1997).
    • (1997) J. Appl. Phys. , vol.81 , pp. 7480-7491
    • Zavala, G.1    Fendler, J.H.2    Trolier-McKinstry, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.