Effect of gettered iron on recombination in diffused regions of crystalline silicon wafers

Applied Physics Letters

Volumn 88, Issue 9, 2006, Pages

  Macdonald, D ^a   MacKel H ^a   Cuevas, A ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; DIFFUSION; IRON; PHOSPHORUS; SILICON; WSI CIRCUITS;

GETTERED IRON; INTERSTITIAL IRON; RECOMBINATION IN DIFFUSED REGIONS;

CRYSTALLINE MATERIALS;

EID: 33644696867     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2181199     Document Type: Article

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