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Volumn 95, Issue 3, 2004, Pages 1021-1028

Iron detection in crystalline silicon by carrier lifetime measurements for arbitrary injection and doping

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CARRIER CONCENTRATION; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; DISSOCIATION; PHOTOCONDUCTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; SILICON WAFERS; SOLUBILITY; THERMAL EFFECTS; VELOCITY;

EID: 1142304524     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1637136     Document Type: Article
Times cited : (236)

References (25)
  • 8
    • 0007953123 scopus 로고    scopus 로고
    • edited by D. C. Gupta, F. R. Bacher, and W. M. Hughes (American Society for Testing and Materials, Philadelphia)
    • T. Pavelka, in Recombination Lifetime Measurements in Silicon, edited by D. C. Gupta, F. R. Bacher, and W. M. Hughes (American Society for Testing and Materials, Philadelphia, 1998), p. 206.
    • (1998) Recombination Lifetime Measurements in Silicon , pp. 206
    • Pavelka, T.1
  • 10
    • 4944256612 scopus 로고    scopus 로고
    • edited by D. C. Gupta, F. R. Bacher, and W. M. Hughes (American Society for Testing and Materials, Philadelphia)
    • R. Falster and G. Barionetti, in Recombination Lifetime Measurements in Silicon, edited by D. C. Gupta, F. R. Bacher, and W. M. Hughes (American Society for Testing and Materials, Philadelphia, 1998), p. 266.
    • (1998) Recombination Lifetime Measurements in Silicon , pp. 226
    • Falster, R.1    Barionetti, G.2
  • 13
    • 0004093089 scopus 로고
    • International Series of Monographs on Semiconductors; (Pergamon, Oxford)
    • J. S. Blakemore, Semiconductor Statistics, International Series of Monographs on Semiconductors Vol. 3 (Pergamon, Oxford, 1962).
    • (1962) Semiconductor Statistics , vol.3
    • Blakemore, J.S.1
  • 16
    • 1142304251 scopus 로고    scopus 로고
    • (University of New South Wales, Sydney, Australia)
    • P. A. Basore and D. A. Clugston, PCID v5.5 (University of New South Wales, Sydney, Australia, 2000).
    • (2000) PCID v5.5
    • Basore, P.A.1    Clugston, D.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.