Photoelastic modulated imaging ellipsometry by stroboscopic illumination technique

Review of Scientific Instruments

Volumn 77, Issue 2, 2006, Pages

  Han, Chien Yuan ^a   Chao, Yu Faye ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; IMAGING TECHNIQUES; LIGHTING; PHOTOELASTICITY; PULSE GENERATORS; SILICA; SILICON; SUBSTRATES; THIN FILMS; ULTRASHORT PULSES; VIDEO CAMERAS;

IMAGING ELLIPSOMETRY; PHOTOELASTIC MODULATED (PEM) ELLIPSOMETRY; SILICON SUBSTRATES;

ELLIPSOMETRY;

EID: 33644605045     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2173027     Document Type: Article

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