A direct determination technique for azimuth alignment in photoelastic modulation ellipsometry

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 A, 1999, Pages 6919-6922

  Chao, Yu Faye ^a   Wang, Charn Kuo ^a,b   Liu, Shing ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Alignment; Ellipsometry; Photoelastic modulator

Indexed keywords

FUNCTIONS; LIGHT MODULATORS; LIGHT POLARIZATION; MATRIX ALGEBRA; PHOTOELASTICITY;

NULLING METHOD; PHOTOELASTIC MODULATION ELLIPSOMETRY; THREE INTENSITY MEASUREMENT TECHNIQUE; ZERO ORDER BESSEL FUNCTION;

ELLIPSOMETRY;

EID: 0033333696     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.6919     Document Type: Article

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5. R. M. A. Azzam and N. M. Bashara: Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1980) p. 387.