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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 2, 2004, Pages 827-832

Calibrations of Phase Modulation Amplitude of Photoelastic Modulator

(7) Wang, Meng Wei a Chao, Yu Faye a Leou, Keh Chyang b Tsai, Fei Hsin a Lin, Tsang Lang b Chen, Shu Shien b Liu, Yu Wei b

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

Ellipsometry; In situ calibration; Photoelastic modulator; Real time

Indexed keywords

CALIBRATION; DATA ACQUISITION; ELLIPSOMETRY; FUNCTIONS; MAXWELL EQUATIONS; NAVIER STOKES EQUATIONS; PHOTOELASTICITY; POLYSILICON; REAL TIME SYSTEMS; THICK FILMS; THICKNESS MEASUREMENT; VECTORS;

IN SITU CALIBRATION; MODULATION AMPLITUDES; MULTIPLE HARMONIC INTENSITY RATIO (MHIR); PHOTOELASTIC MODULATORS (PEM);

PHASE MODULATION;

EID: 2142751674 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.827 Document Type: Article

Times cited : (35)

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