In situ calibration technique for photoelastic modulator in ellipsometry

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 78-83

  Wang, M W ^a   Tsai, F H ^a   Chao, Y F ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Calibration; Ellipsometry; In situ; Photoelastic modulator

Indexed keywords

AMPLIFIERS (ELECTRONIC); CALIBRATION; CATHODE RAY OSCILLOSCOPES; DATA ACQUISITION; FUNCTIONS; PHASE MODULATION; SPURIOUS SIGNAL NOISE; WAVEFORM ANALYSIS;

IN SITU; MODULATION AMPLITUDES; PHOTOELASTIC MODULATOR; ROTATING POLARIZERS;

ELLIPSOMETRY;

EID: 17144473954     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.048     Document Type: Conference Paper

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