Microfabrication influence on the behavior of capacitive type MEMS sensors and actuators

Sensor Review

Volumn 26, Issue 1, 2006, Pages 58-65

  Packirisamy, Muthukumaran ^a  

^a Civil and Environmental Engineering   (Canada)

Author keywords

Electromechanical devices; Sensors

Indexed keywords

ACTUATORS; ELASTICITY; RAYLEIGH SCATTERING; SENSORS;

ELASTIC STIFFENING; MICROFABRICATION; RAYLEIGH ENERGY METHOD;

MICROELECTROMECHANICAL DEVICES;

EID: 33644534840     PISSN: 02602288     EISSN: None     Source Type: Journal    
DOI: 10.1108/02602280610640698     Document Type: Article

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