Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

KSME International Journal

Volumn 18, Issue 5, 2004, Pages 789-797

  Kim, Deok Ho ^a   Kim, Byungkyu ^a   Park, Jong Oh ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Atomic Force Microscope (AFM); Micro Force Sensing; Micro Nano manipulation; Microrobotics; Piezoresistive MEMS Cantilever; Van der Waals Force

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; ELECTRIC RESISTANCE; ELECTROSTATICS; FORCE MEASUREMENT; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; PIEZOELECTRIC DEVICES; SENSORS; VAN DER WAALS FORCES;

MICRO FORCE SENSING; MICRO/NANO-MANIPULATION; MICROROBOTICS; PIEZORESISTIVE MEMS CANTILEVERS;

ROBOTICS;

EID: 10044268742     PISSN: 12264865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02990297     Document Type: Article

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