Photosensitive poly(benzoxazole) via poly(o-hydroxy azomethine) II. Environmentally benign process in ethyl lactate

Polymer Journal

Volumn 36, Issue 6, 2004, Pages 489-494

  Fukukawa, Ken Ichi ^a   Shibasaki, Yuji ^a   Ueda, Mitsuru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Environmentally friendly process; High temperature material; Low dielectric constants; Photoresist; Photosensitive material; Poly(benzoxazole)s; Poly(o hydroxyazomethine)

Indexed keywords

BENZENE; ENVIRONMENTAL IMPACT; HYDROLYSIS; PERMITTIVITY; PHOTORESISTS; PHOTOSENSITIVITY; POLYCONDENSATION; SENSITIVITY ANALYSIS;

ENVIRONMENTALLY FRIENDLY PROCESS; HIGH TEMPERATURE MATERIAL; LOW DIELECTRIC CONSTANTS; PHOTOSENSITIVE MATERIAL; POLY(BENZOXAZOLE)S; POLY(O-HYDROXYAZOMETHINE);

ALDEHYDES;

EID: 3342906184     PISSN: 00323896     EISSN: None     Source Type: Journal    
DOI: 10.1295/polymj.36.489     Document Type: Article

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