Rapid, low cost microfabrication technologies toward realization of devices for dielectrophoretic manipulation of particles and nanowires

Sensors and Actuators, B: Chemical

Volumn 114, Issue 1, 2006, Pages 392-401

  Rajaraman, Swaminathan ^a,c   Noh, Hong Seok ^a,d   Hesketh, Peter J ^{a,e,f,g,h,i,j}   Gottfried, David S ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA TECH RESEARCH INSTITUTE   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^d Drexel University   (United States)

^e GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^f School of Mechanical Engineering

^g AAAS   (United States)

^h AAAS ^*

ⁱ ASME

^j IEEE

more..

Author keywords

Dielectrophoresis (DEP); Micro total analysis systems ( TAS); Microfabrication technologies

Indexed keywords

DIELECTROPHORESIS (DEP); MICROFABRICATION TECHNOLOGIES; PARYLENE;

BIOCOMPATIBILITY; FABRICATION; LITHOGRAPHY; MICROORGANISMS; MICROPROCESSOR CHIPS; NANOSTRUCTURED MATERIALS;

ELECTROPHORESIS;

EID: 33244496642     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.06.022     Document Type: Article

References (24)

1. K. Huikko, R. Kostiainen, and T. Kotiaho Introduction to micro-analytical systems: bioanalytical and pharmaceutical applications Eur. J. Pharm. Sci. 20 2003 149 171
2. R. Pethig Dielectrophoresis: using inhomogeneous AC electric fields to separate and manipulate cells Crit. Rev. Biotechnol. 16 1996 331 348
3. E.B. Cummings, and A.K. Singh Dielectrophoresis in microchips containing arrays of insulating posts: theoretical and experimental results Anal. Chem. 75 2003 4724 4731
4. L. Cui, and H. Morgan Design and fabrication of traveling wave dielectrophoresis structures J. Micromech. Microeng. 10 2000 72 79
5. Y. Huang, K.L. Ewalt, M. Tirado, R. Haigis, A. Forster, D. Ackley, M.J. Heller, J.P. O'Connell, and M. Krihak Electric manipulation of bioparticles and macromolecules on microfabricated electrodes Anal. Chem. 73 2001 1549 1559
6. G. Medero, N. Manaresi, A. Leonardi, L. Altomare, M. Tartagni, and R. Guerrieri A lab-on-a-chip for cell detection and manipulation IEEE Sens. J. 3 2003 317 325
7. H. Li, and R. Bashir Dielectrophoretic separation and manipulation of live and heat-treated cells of listeria on microfabricated devices with interdigitated electrodes Sens. Actuators B 86 2002 215 221
8. F.F. Becker, X-B. Wang, Y. Huang, R. Pethig, J. Vykoukal, and R.C. Gascoyne The removal of human leukaemia cells from blood using interdigitated microelectrodes J. Phys. D: Appl. Phys. 27 1994 2659 2662
9. S. Rajaraman, H-S. Noh, A. Choudhury, J. Street, P.J. Hesketh, and D.S. Gottfried Stereolithography-based dielectrophoretic microchannels for enrichment of bio-particles Proceedings of the 205th Meeting of the Electrochemical Society San Antonio, TX, May 2004
10. P. Van Gerwen, W. Laureyn, W. Laureys, G. Huyberechts, M.O. De Beeck, K. Baert, J. Suls, W. Sansen, P. Jacobs, L. Hermans, and R. Martens Nanoscaled interdigital electrode arrays for biochemical sensors Sens. Actuators B 49 1998 73 80
11. H-S. Noh, P.J. Hesketh, and G.C. Frye-Mason Parylene gas chromatographic column for rapid thermal cycling IEEE J. Microelectromech. Syst. 11 6 2002 718 725
12. H.-S. Noh, Y. Choi, C.-F. Wu, P.J. Hesketh, and M.G. Allen Rapid, low cost fabrication of parylene microchannels for microfluidics applications, transducers 2003 solid state sensors, actuators and microsystems Proceedings of the 12th International Conference, vol. 1 Boston, MA 2003 798 801
13. H.-S. Noh, K.-S. Moon, A. Cannon, P.J. Hesketh, and C.P. Wong Wafer bonding using microwave heating of parylene intermediate layers J. Micromech. Microeng. 14 2004 625 631
14. T.N. Pornsin-Sirirak, Y.C. Tai, H. Nassef, C.M. Ho, Flexible parylene actuator for micro adaptive flow control, IEEE MEMS Conference, 2001, pp. 511-514.
15. P.F. Jacobs Stereolithography and Other RP&M Technologies 1996 ASME Press New York, NY
16. L.A. Tse, L. Seals, J.L. Gole, P.J. Hesketh, D.W. Rosen, Fabrication of chemical sensor packaging with stereolithography, Artificial Chemical Sensing/Olfaction and the Electronic Nose-ISOEN 2001 (Proceedings of the ECS), vol. 2001-15, 2001, pp. 98-104.
17. E. Forsen, P. Carlberg, L. Montelius, and A. Boisen Laser lithography on resist bi-layer for nanoelectromechanical system prototyping Microelectron. Eng. 73-74 2004 491 495
18. A. Gadre, and R. Ghodssi An integrated BioMEMS fabrication technology International Semiconductor Device Research Symposium (ISDRS) Washington, DC, December 2001
19. B.-H. Jo, L.M. Van Lerberghe, K.M. Motsegood, and D.J. Beebe Three dimensional microchannel fabrication in polydimethylsiloxane (PDMS) elastomer IEEE J. Microelectromech. Syst. 9 1 2000 76 81
20. D. Duffy, J.C. McDonald, O.J.A. Schueller, and G.M. Whitesides Rapid prototyping of microfluidic systems in polydimethylsiloxane Anal. Chem. 70 23 1998 4974 4984
21. www.scscookson.com
22. Z.W. Pan, Z.R. Dai, and Z.L. Wang Nanobelts of semiconducting oxides Science 291 2001 1947 1949
23. E. Comini, G. Faglia, G. Sberveglieri, Z.W. Pan, and Z.L. Wang Stable and high-sensitive gas sensors based on semiconducting oxide nanobelts Appl. Phys. Lett. 81 2002 1869 1871
24. C.-T. Pan, H. Yang, S.-C. Shen, M.-C. Chou, and H.-P. Chou A low-temperature wafer bonding technique using patternable materials J. Micromech. Microeng. 12 2002 611 615