SCOPUS 정보 검색 플랫폼

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 798-801

Rapid, low-cost fabrication of parylene microchannels for microfluidic applications

(5) Noh, Hong Seok a Choi, Yoonsu b Wu, Chi Fu a Hesketh, P J a Allen, M G b

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

b GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Application software; Bonding; Costs; Etching; Fabrication; Microchannel; Microfluidics; Micromachining; Resists; Silicon

Indexed keywords

ACTUATORS; APPLICATION PROGRAMS; BONDING; COSTS; ETCHING; FABRICATION; MICROCHANNELS; MICROFLUIDICS; MICROMACHINING; MICROSYSTEMS; SILICON; TRANSDUCERS;

DIELECTROPHORETIC; LONG SPIRALS; LOW COST FABRICATION; MICRO FLUIDIC APPLICATIONS; MICROMOLDING; PARYLENES; RESISTS; TECHNICAL ASPECTS;

SOLID-STATE SENSORS;

EID: 27544434333 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2003.1215594 Document Type: Conference Paper

Times cited : (13)

References (7)

1
- 0032665520
- A parylene micro check valve
- X-Q. Wang, L. Qiao, and Y. C. Tai, "A parylene micro check valve." Proc. 1999 IEEE Int. MEMS Conf., 177-182.
- Proc. 1999 IEEE Int. MEMS Conf. , pp. 177-182
- Wang, X.-Q.¹ Qiao, L.² Tai, Y.C.³

2
- 0032687821
- Polymer-based electrospray chips for mass spectrometry
- X-Q. Wang, A. Desai, Y. C. Tai, L. Licklider, and T. D. Lee, "Polymer-based electrospray chips for mass spectrometry." Proc. 1999 IEEE Int. MEMS Conf., 523-528.
- Proc. 1999 IEEE Int. MEMS Conf. , pp. 523-528
- Wang, X.-Q.¹ Desai, A.² Tai, Y.C.³ Licklider, L.⁴ Lee, T.D.⁵

3
- 0034998257
- Flexible parylene actuator for micro adaptive flow control
- T. N. Pornsin-Sirirak, Y-C. Tai, H. Nassef, and C. M. Ho, "Flexible parylene actuator for micro adaptive flow control." Proc. 2001 IEEE Int. MEMS Conf., 511-514.
- Proc. 2001 IEEE Int. MEMS Conf. , pp. 511-514
- Pornsin-Sirirak, T.N.¹ Tai, Y.-C.² Nassef, H.³ Ho, C.M.⁴

4
- 0033709144
- Electrophoresis system with integrated on-chip fluorescence detection
- J. R. Webster, M. A. Burns, D. T. Burke, C. H. Mastrangelo, "Electrophoresis system with integrated on-chip fluorescence detection." Proc. 2000 IEEE Int. MEMS Conf., 306-310.
- Proc. 2000 IEEE Int. MEMS Conf. , pp. 306-310
- Webster, J.R.¹ Burns, M.A.² Burke, D.T.³ Mastrangelo, C.H.⁴

5
- 0036906332
- Parylene Gas Chromatographic Column for Rapid Thermal Cycling
- H-S. Noh, P. J. Hesketh, and G. C. Frye-Mason, "Parylene Gas Chromatographic Column for Rapid Thermal Cycling." Journal of Microelectromechanical Systems, Vol. 11, No. 6, 718-725 (2002).
- (2002) Journal of Microelectromechanical Systems , vol.11 , Issue.6 , pp. 718-725
- Noh, H.-S.¹ Hesketh, P.J.² Frye-Mason, G.C.³

6
- 0034996864
- Photoresist as a sacrificial layer by dissolution in acetone
- K. Walsh, J. Norville, and Y. C. Tai, "Photoresist as a sacrificial layer by dissolution in acetone." Proc. 2001 IEEE Int. MEMS Conf., 114-117.
- Proc. 2001 IEEE Int. MEMS Conf. , pp. 114-117
- Walsh, K.¹ Norville, J.² Tai, Y.C.³

7
- 0003315396
- Fabrication of parylene column for micro gas chromatograph
- th Mechatronics Forum International Conference, 2000.
- th Mechatronics Forum International Conference, 2000
- Noh, H.-S.¹ Hesketh, P.J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.