High-sensitivity light scattering measurement of optical coating components

Optics InfoBase Conference Papers

Volumn , Issue , 2004, Pages

  Gliech, Stefan ^a   Schröder, Sven ^a   Duparré, Angela ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FIBER OPTIC SENSORS; LIGHT INTERFERENCE; LIGHT SCATTERING;

HIGH SENSITIVITY; IR SPECTRAL REGIONS; LIGHT SCATTERING MEASUREMENT; MEASUREMENT SYSTEM; MEASUREMENTS OF; WAVELENGTH RANGES;

OPTICAL COATINGS;

EID: 29244467210     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. A. Duparré, J. Ferre-Borrull, S. Gliech, G. Notni, J. Steinert, and J. Bennett, "Surface characterization techniques for determining the rootmean-square roughness and power spectral densities of optical components", Appl. Opt. 41, 154-171 (2002).
2. S. Gliech, J. Steinert, A. Duparré, "Light-scattering measurements of optical thin-film components at 157 nm and 193 nm", Appl. Opt. 41, 3224-3235 (2002).
3. ISO 13696, "Optics and optical instruments: Test methods for radiation scattered by optical components", DIN-Normenausschuss NAFuO, AA O18 AK2, "Optische Komponenten und Werkstoffe", ISO-Committee ISO/TC 172/SC 9/WG 6