Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5963, Issue , 2005, Pages

  Schröder, Sven ^a   Uhlig, Hein ^a   Duparré, Angela ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Angle resolved scatter; Coatings; DUV; Fluoride; GdF3; Reflectance; SmF3; Thin films; Total scatter; VUV; YbF3; YF 3

Indexed keywords

ABSORPTION; GADOLINIUM COMPOUNDS; LIGHT SCATTERING; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; SAMARIUM COMPOUNDS; YTTERBIUM COMPOUNDS;

ANGLE RESOLVED SCATTER; FLUORIDE; GDF3; TOTAL SCATTER;

THIN FILMS;

EID: 33144456550     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.624499     Document Type: Conference Paper

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