Integration of silicon bench with micro optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3631, Issue , 1999, Pages 234-243

  Han, H ^a   Stack, J D ^a   Mathews, J ^a   Koehler, C S ^a   Johnson, E ^a   Kathman, A D ^a  

^a Digital Optics Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ETCHING; INTEGRATED OPTOELECTRONICS; MICROMACHINING; MICROOPTICS; OPTICAL FIBERS; OPTICAL INSTRUMENT LENSES; SILICON WAFERS; SOLUTIONS;

ACTIVE ALIGNMENT; BINARY OPTICS; DIFFRACTIVE OPTICAL ELEMENTS; MICRO ROD OPTICS; MICROLENS; PASSIVE ALIGNMENT; SILICON BENCH; SILICON V-GROOVE;

ELECTRONICS PACKAGING;

EID: 0032634995     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)